SETYAWATI, Onny; CHOIRON, Moch. Agus; BANGERT, Axel; SANDHAGEN, Carl. Multi-Objective Optimization of MEMS-based Box Pattern Microheaters Using Response Surface Method. Elinvo (Electronics, Informatics, and Vocational Education), [S. l.], v. 9, n. 2, p. 265–273, 2024. DOI: 10.21831/elinvo.v9i2.77133. Disponível em: https://journal.uny.ac.id/index.php/elinvo/article/view/77133. Acesso em: 13 may. 2025.